Yttrium oxide-containing material, component of...

Details Yttrium oxide-containing material, component of... Yttrium oxide-containing material, component of...

2008-03-07

2010-11-16

Group, Karl E (Department: 1793)

Compositions: ceramic

Ceramic compositions

Yttrium, lanthanide, actinide, or transactinide containing

C501S088000

Reexamination Certificate

active

07833924

ABSTRACT:
There is provided an yttrium oxide-containing material with excellent mechanical characteristics. The yttrium oxide-containing material becomes strong by adding silicon carbide (SiC) and yttrium fluoride (YF3) to yttrium oxide (Y2O3). Accordingly, the yield, handling and reliability can be improved when this strengthened yttrium oxide-containing material is applied to and used for components of semiconductor manufacturing equipment.

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