Yttria sintered body, electrostatic chuck, and manufacturing...

Details Yttria sintered body, electrostatic chuck, and manufacturing... Yttria sintered body, electrostatic chuck, and manufacturing...

2006-08-14

2008-10-28

Group, Karl E (Department: 1793)

Stock material or miscellaneous articles

Composite

Of inorganic material

C428S699000, C428S701000, C428S702000, C501S088000, C501S152000, C279S128000

Reexamination Certificate

active

07442450

ABSTRACT:
A yttria sintered body contains an amount of silicon carbide within a range of 5 to 40% by volume, has a volume resistivity at room temperature within a range of 1×101to 1×1017Ω·cm, and is adapted for application to an electrostatic chuck.

REFERENCES:
patent: 6139983 (2000-10-01), Ohashi et al.
patent: 6632549 (2003-10-01), Ohashi et al.
patent: 7220497 (2007-05-01), Chang
patent: 2006/0073349 (2006-04-01), Aihara et al.
patent: 2006/0199722 (2006-09-01), Aihara et al.
patent: 110798830 (1999-03-01), None
patent: 2002-068838 (2002-03-01), None
patent: 2002-255647 (2002-09-01), None

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