Yttria-alumina composite oxide films, laminated bodies...

Stock material or miscellaneous articles – Composite – Of inorganic material

Reexamination Certificate

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C428S699000, C428S701000, C428S702000, C428S336000, C427S427000, C427S248100

Reexamination Certificate

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06858332

ABSTRACT:
An object of the invention is to provide an yttria-alumina composite oxide film wherein peeling-off of the film from a substrate may be prevented. An intermediary layer is provided on a substrate containing at least one of alumina and yttria-alumina composite oxide as a main component. In the intermediary layer, a ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is not smaller than 0.1 and not larger than 0.9. An yttria-alumina composite oxide film is formed on the intermediary layer. A ratio (YAG (420)/M) of a peak intensity YAG (420) of a (420) plane of a garnet phase to a maximum peak intensity M of crystal phases other than the garnet phase is 2.5 or more in the yttria-alumina composite oxide film based on an X-ray diffraction measurement.

REFERENCES:
patent: 6641941 (2003-11-01), Yamada et al.
patent: 6783875 (2004-08-01), Yamada et al.
patent: 20020177001 (2002-11-01), Harada et al.
patent: 20030059653 (2003-03-01), Yamada et al.
patent: 20040067392 (2004-04-01), Yamada et al.
patent: 2001-110136 (2001-04-01), None
U.S. Appl. No. 10/746,353, filed Dec. 24, 2003, Yamada et al.
U.S. Appl. No. 10/453,853, filed Jul. 15, 2003, Yamada et al.
U.S. Appl. No. 10/197,037, filed Jul. 17, 2002, Hirotake Yamada.

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