Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2006-08-06
2008-08-12
Cherry, Euncha P (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S291000
Reexamination Certificate
active
07411713
ABSTRACT:
A micromirror array110fabricated on a semiconductor substrate11. The array110is comprised of four operating layers12, 13, 14, 15. An addressing layer12is fabricated on the substrate. A raised electrode layer13is spaced above the addressing layer by an air gap. A hinge layer14is spaced above the raised electrode layer13by another air gap. A mirror layer15is spaced over the hinge layer14by a third air gap.
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Brady III Wade James
Cherry Euncha P
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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