Optics: image projectors – Reflector – Plural
Reexamination Certificate
2007-08-06
2010-02-02
Dowling, William C (Department: 2851)
Optics: image projectors
Reflector
Plural
C359S291000, C359S295000, C348S771000
Reexamination Certificate
active
07654677
ABSTRACT:
A micromirror array110fabricated on a semiconductor substrate11. The array110is comprised of three operating layers12, 13, 14. An addressing layer12is fabricated on the substrate. A hinge layer13is spaced above the addressing layer12by an air gap. A mirror layer14is spaced over the hinge layer13by a second air gap. The hinge layer13has a hinge13aunder and attached to the mirror14a, the hinge13apermitting the mirror14ato tilt. The hinge layer13further has spring tips13cunder the mirror14a, which are attached to the addressing layer12. These spring tips13cprovide a stationary landing surface for the mirror14a.
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DiCarlo Anthony
Huffman James D.
Knipe Richard L.
Mezenner Rabah
Oden Patrick I.
Brady III Wade James
Brill Charles A.
Dowling William C
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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