Electric heating – Metal heating – By arc
Patent
1992-03-12
1993-07-13
Albritton, C. L.
Electric heating
Metal heating
By arc
21912173, 21912175, 21912182, B23K 2600
Patent
active
052276074
ABSTRACT:
This invention relates to a YAG laser working machine, and an object thereof is to enable highly precise processing such as one required for processing of a photomask which is used at, for example, a step of manufacturing semiconductors. The YAG laser working machine according to this invention is such that a machine body is provided with restriction means for reducing a beam diameter of a laser beam, is provided with shutter means for executing ON.multidot.OFF control of application of the laser beam at a location on the outside of the oscillator, and is provided with highly harmonizing means for the laser beam. A base disk on which the machine body is mounted is formed of solid stone, and is mounted on a plurality of legs through interposition of respective pneumatic springs. Pulse signals regarding the X-movement and the Y-movement of an XY-table are processed by an OR circuit. Pulse application of the laser beam is controlled on the basis of the signals processed by the OR circuit.
REFERENCES:
patent: 4752668 (1988-06-01), Rosenfield et al.
patent: 4843209 (1989-06-01), Milligan
patent: 5095190 (1992-03-01), Aketagawa et al.
patent: 5140128 (1992-08-01), Jonei et al.
Albritton C. L.
JVF Inc.
Mid Co., Ltd.
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