XY table using a linear electromagnetic actuator

Details XY table using a linear electromagnetic actuator XY table using a linear electromagnetic actuator

1997-03-18

1998-06-02

Stephan, Steven L.

Electrical generator or motor structure

Dynamoelectric

Linear

33 1M, 7447901, 248913, H02K 4100, G05G 1100

Patent

active

057605009

ABSTRACT:
An XY table that uses linear electromagnetic actuators to achieve faster operating speeds, improve durability, prevent generation of dust and reduce size (make more compact). The cord for supplying electrical power to the linear electromagnetic actuators and the cords for obtaining signals from each type of sensor are concentrated at an intermediate movement member (X table), and gathered together into a single cord that is used for connection to the outside (controller, etc.). As a result, detrimental effects caused by the cord are minimized which enables the XY table to demonstrate the performance described above.

REFERENCES:
patent: 4575652 (1986-03-01), Gogue
patent: 5228358 (1993-07-01), Sakino et al.
patent: 5523941 (1996-06-01), Burton et al.
patent: 5699621 (1997-12-01), Trumper et al.

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