XY table

Details XY table XY table

2000-01-31

2001-06-12

Wilkens, Janet M. (Department: 3636)

Horizontally supported planar surfaces

Power driven

C108S102000

Reexamination Certificate

active

06244192

ABSTRACT:

TECHNICAL FIELD
The present invention relates to an XY table which is used as a positioning table in semiconductor assembling equipment, machine tools, measurement equipment, etc.
BACKGROUND OF THE INVENTION
A prior art XY table is constructed as shown in FIG.
4
. In the same drawing, a base is indicated by
30
, on which a guide rail
31
installed in the X-axis direction and a guide rail
32
installed at the end portion of the guide rail
31
in the Y-axis direction are provided on the base
30
. An X-axis table is indicated by
33
, which is placed on the guide rail
31
movably in the X-axis direction, and two guide rollers
34
and
35
are attached on the X-axis table
33
. An X-axis drive motor is indicated by
36
, and an X-axis feed screw
37
having a ball screw is connected to the rotating shaft on the X-axis drive motor
36
. A ball nut (not illustrated) attached to the rear side of the X-axis table
33
is screwed in the X-axis feed screw
37
, whereby the X-axis table
33
is driven to move in the X-axis direction by rotations of the X-axis feed screw
37
. A Y-axis table
38
is placed on the guide rail
32
and attached thereon so as to be movable in the Y-axis direction, and a guide rail
39
extending in the X-axis direction is laid on the Y-axis table
38
. A Y-axis drive motor is indicated by
40
, and a Y-axis feed screw
41
having a ball screw is connected to the rotating shaft of the Y-axis drive motor, wherein a ball nut (not illustrated) attached on the rear side of the Y-axis table
38
is screwed in the Y-axis feed screw
41
, and the Y-axis table
38
is constructed so as to be moved in the Y-axis direction by rotations of the Y-axis feed screw
41
. A top table is indicated by
42
, in which a groove
43
extending in the Y-axis direction is provided at one side of the top table
42
, and one guide roller
34
secured at the X-axis table
33
is brought into contact with the side of the top table
42
while the other guide roller
35
is inserted into the groove
43
.
Next, a description is given of the actions of the XY table. As the X-axis drive motor
36
is driven, the X-axis table
33
moves in the X-axis direction via the ball screw of the X-axis feed screw
37
connected to the axis end of the rotating shaft of the X-axis drive motor
36
, and at the same time, the top table
42
moves in the X-axis direction via the guide rollers
34
and
35
secured on the X-axis table
33
. Next, as the Y-axis drive motor
40
is driven, the Y-axis table
38
moves in the Y-axis direction via the ball screw of the Y-axis feed screw connected to the axis end of the Y-axis drive motor
40
. As the Y-axis table
38
moves in the Y-axis direction, the top table
42
on the guide rail
39
laid on the Y-axis table moves in the Y-axis direction integral with the Y-axis table. As the top table
42
moves in the Y-axis direction, the guide rollers
34
and
35
of the X-axis table
33
cause the top table
42
to move and stop at an appointed position while sliding along the side of the top table
42
or in the groove
43
.
However, the prior art XY table connects the ball screws attached to the rear side of the X-axis table
33
and Y-axis table
38
to the ball screws of the X-axis feed screw
37
and Y-axis feed screws
41
each connected to the X-axis drive motor
36
and the Y-axis drive motor
40
and cause the X-axis table
33
and the Y-axis table
38
to move. Therefore, it is not possible for the X-axis table
33
and the Y-axis table
38
to be accurately positioned due to errors in screw connection between the ball screw and ball nut. Further, it is not possible for the X-axis table
33
and Y-axis table
38
to move at high-speed acceleration and deceleration by a speed limitation of the ball screws. Therefore, the top table
42
, which moves in compliance with the X-axis table
33
and Y-axis table
38
cannot be accurately positioned. Also, the top table
42
cannot be moved at high-speed acceleration and deceleration.
SUMMARY OF THE INVENTION
Therefore, it is an object of the invention to provide an XY table which can allow the top table to be positioned at high accuracy and to be moved at high-speed acceleration and deceleration.
In order to solve the above-mentioned problems and shortcomings, the invention provides an XY table which comprises an X-axis table movably supported on a base in the X-axis direction; a Y-axis table movably supported on the base in the Y-axis direction; and a top table which is movable in the X-axis direction along with movements of the X-axis table and movable in the Y-axis direction along with movements of the Y-axis table, wherein the XY table further comprises an armature of a linear motor attached on an X-axis base which movably supports the X-axis table, a movable element which is attached to the rear side of the X-axis table and is opposed to the armature of the linear motor, an armature of a linear motor attached to the Y-axis base which supports the Y-axis, and a movable element which is attached to the rear side of the Y-axis table and is opposed to the armature of the linear motor.


REFERENCES:
patent: 4667139 (1987-05-01), Hirai et al.
patent: 1-195389 (1989-08-01), None
patent: 5-100062 (1993-04-01), None
patent: 9-123034 (1997-05-01), None
patent: 9-201031 (1997-07-01), None

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