XY stage module, storage system employing the same and...

Details XY stage module, storage system employing the same and... XY stage module, storage system employing the same and...

2008-01-08

2008-01-08

Guadalupe-McCall, Yaritza (Department: 2859)

Geometrical instruments

Miscellaneous

Light direction

C033S568000, C033S573000

Reexamination Certificate

active

11546240

ABSTRACT:
An XY stage module, a storage system including the same and a method for facating the XY stage module are provided. The XY stage module includes: a base; an XY stage horizontally moving above the base in a first direction and a second direction that is orthogonal to the first direction; a supporting unit disposed at the base for elastically supporting the XY stage; a stiffener for preventing the XY stage from being rotated; and a position sensor having a movable comb-shaped structure disposed at one side of the stiffener and having at least one movable comb and a fixed comb-shaped structure fixed on the base and having at least one fixed comb meshed with the movable comb to be separated at a predetermined gap for measuring a movement of the XY stage in the first direction and the second direction.

REFERENCES:
patent: 6817104 (2004-11-01), Kaneko et al.
patent: 7240434 (2007-07-01), Lee et al.

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