Horizontally supported planar surfaces – Power driven
Reexamination Certificate
2000-09-05
2010-02-02
Chen, Jose V. (Department: 3637)
Horizontally supported planar surfaces
Power driven
Reexamination Certificate
active
07654207
ABSTRACT:
An XY stage comprises a base, a movable table which is disposed on the base so as to be movable in an X direction and a Y direction in an X-Y plane, and a work member which is provided on the movable table. The XY stage further comprises: a first linear motor for giving a driving force in the X direction to the movable table at the same height as the center of gravity of a movable section composed of the movable table and the work member; and a second linear motor for giving a driving force in the Y direction to the movable table at the same height as the center of gravity of the movable section.
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Kubota Noriyuki
Oishi Junichiro
Shoji Maho
Chen José V.
Muirhead and Saturnelli LLC
NEC Corporation
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