XY stage

Horizontally supported planar surfaces – Power driven

Reexamination Certificate

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Reexamination Certificate

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07654207

ABSTRACT:
An XY stage comprises a base, a movable table which is disposed on the base so as to be movable in an X direction and a Y direction in an X-Y plane, and a work member which is provided on the movable table. The XY stage further comprises: a first linear motor for giving a driving force in the X direction to the movable table at the same height as the center of gravity of a movable section composed of the movable table and the work member; and a second linear motor for giving a driving force in the Y direction to the movable table at the same height as the center of gravity of the movable section.

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Abstract of Japanese Patent Application No. 09262727-A.

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