XRR detector readout processing

Details XRR detector readout processing XRR detector readout processing

2005-05-17

2005-05-17

Church, Craig E. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Fluorescence

C378S098800

Reexamination Certificate

active

06895071

ABSTRACT:
Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.

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Model S7032-0908N array, Produced by Hamamatsu, of Hamamatsu City, Japan, May, 2000.
William Johnson, et al., “ULSI Application of Rapid X-Ray Reflectometry”, Therma Wave, Inc. Jun. 26, 2000.

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