Xenon flash lamp shield

Details Xenon flash lamp shield Xenon flash lamp shield

1980-12-10

1983-03-29

Walsh, Donald P.

Illumination

Light source and modifier

Ionized gas or vapor light source

362 18, 362303, 362305, 350269, 350277, F21V 700

Patent

active

043785832

ABSTRACT:
The flash lamp shield is used with helical xenon flash lamps to shield the radiation from high current density regions adjacent the anode and cathode of the flash lamp. The inventor has found that helical xenon flash lamps including the shield are particularly effective in exposure systems to expose photoresist materials used in semiconductor manufacturing processes.

REFERENCES:
patent: 3646349 (1972-02-01), Rietveld
patent: 3668990 (1972-06-01), Hayes
patent: 3860335 (1975-01-01), Caprari
patent: 3900727 (1975-08-01), Hutz
Goncz, et al.; Journal of the Optical Society of America, vol. 56, No. 1, 87-92, Jan. 1966.
Doane, et al.; Solid State Technology, Aug. 1980, pp. 101-114.

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