X-Y table error mapping apparatus and method

Details X-Y table error mapping apparatus and method X-Y table error mapping apparatus and method

1988-08-15

1990-11-20

Smith, Jerry

Boots, shoes, and leggings

364559, 36447434, 382 8, 358101, 358106, 358107, G01B 900, G06F 1546, G06K 900, H04N 700

Patent

active

049723111

ABSTRACT:
Apparatus and a method of correcting for repeatable positioning errors in an X-Y table is provided. An accurate mask is provided having a plurality of repetitive recognizable patterns thereon which is placed in the field of view of a pattern recognition system of a semiconductor processing machine to be calibrated. The semiconductor processing machine is programmed to perform a series of steps which steps the X-Y table to positions which are supposedly accurate relative to a fixed point. At each of the stepped points, the plurality of repetitive recognizable patterns on the mask are electronically scanned by the pattern recognition system and the deviation of the position of the pattern relative to the desired position is calculated to provide X and Y deviations from the theoretical position of the X-Y table. These deviations of points along a linear X and a linear Y axis are employed to calculate the actual deviations of other pattern points for all of the possible positions of movement along other X and Y axes.

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patent: 4835704 (1989-05-01), Eichelberger et al.
patent: 4870288 (1989-09-01), Abuku et al.

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