X-Y table

Details X-Y table X-Y table

1996-05-10

1997-09-23

Watson, Robert C.

Work holders

Holder mounted for movement

With plural means for changing holder positions

B23Q 125

Patent

active

056696000

ABSTRACT:
An X-Y table produces no dust and maintains a high positioning accuracy. Slide blocks are slidably mounted on an x-axis bar guide and a y-axis bar guide through air bearings. They are moved along the respective bar guides by linear motors. A sub-bar guide is fixed to one end of the slide block supported on the x-axis bar guide. It extends through a hole formed in a stage to slidably support the stage through an air bearing. Another sub-bar guide has its one end fixed to the stage and extends through a hole formed in the slide block supported on the y-axis bar guide to slidably support it through an air bearing. The x-axis motor has a yoke having a top surface opposite the bottom surface of the stage. Permanent magnets provided on the bottom surface of the stage attracts the top surface of the yoke. The stage is moved in the x-axis and y-axis directions while keeping it out of contact with the yoke by balancing the magnetic attraction force of the permanent magnets with the pressure of compressed air injected through nozzles of the stage against the top surface of the yoke.

REFERENCES:
patent: 4129291 (1978-12-01), Kato et al.
patent: 4234175 (1980-11-01), Sato et al.
patent: 4615515 (1986-10-01), Suzuta et al.
patent: 4684315 (1987-08-01), Sugishima et al.
patent: 4834353 (1989-05-01), Chitayat
patent: 5022619 (1991-06-01), Mamada

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