X-Y stage with ultrasonic actuator

Details X-Y stage with ultrasonic actuator X-Y stage with ultrasonic actuator

1989-10-17

1991-05-07

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, H01L 4108

Patent

active

050139584

ABSTRACT:
An X-Y stage including a fixed plate, a moving plate adapted to linearly reciprocatively move relative to the fixed plate, and an ultrasonic linear motor provided on either the fixed plate or the moving plate. The ultrasonic linear motor is provided with at lest two leg portions oriented in a direction perpendicular to a moving direction of the moving plate, a body portion for connecting base ends of the leg portions, and vibration sources for vibrating the leg portions and the body portion. The leg portions have free ends pressed against the other of the fixed plate on which the motor is not provided and the moving plate.

REFERENCES:
patent: 4613782 (1986-09-01), Mori et al.
patent: 4742260 (1988-05-01), Shimizu et al.
patent: 4784323 (1988-11-01), Miller
patent: 4857791 (1989-08-01), Uchino et al.

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