X-Y stage with arcuate surface bearings

Details X-Y stage with arcuate surface bearings X-Y stage with arcuate surface bearings

1998-11-17

2000-10-17

Hannon, Thomas R.

Bearings

Linear bearing

With temperature, electrical, or orthogonal feature

7449009, 108137, 248913, 384 2, 384 7, 384 36, F16C 2900

Patent

active

061320919

ABSTRACT:
A two-axis stage assembly includes a generally planar horizontally mounted base plate; a stage plate generally parallel to the base plate, the stage plate having a first axis and second orthogonal axis; a set of spaced bearings depending from a bottom surface of said stage plate, the bearings each having an arcuate bottom surface in rocking contact with a facing support surface of the base plate; a joint attached to the bottom surface of the stage plate and pivotably mounting each bearing, the joint being positioned at the center of curvature of the arcuate bottom surface of the associated bearing; and where an axial movement of the stage plate rocks the bearing arcuate bottom surfaces with respect to the facing support surface of the base plate.

REFERENCES:
patent: 4438983 (1984-03-01), Davis
patent: 5152488 (1992-10-01), Richardson
patent: 5366297 (1994-11-01), Wolverton et al.
patent: 5466068 (1995-11-01), Andra et al.

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