X-ray transmitting window and method of mounting the same

Details X-ray transmitting window and method of mounting the same X-ray transmitting window and method of mounting the same

1991-08-01

1992-10-27

Church, Craig E.

X-ray or gamma ray systems or devices

Beam control

Window

378 34, G21K 100

Patent

active

051596210

ABSTRACT:
An X-ray transmitting window for use in X-ray lithography, for allowing transmission therethrough of X-rays from a vacuum ambience to a different ambience, includes an X-ray transmitting film, and a gasket material gas-tightly provided on at least one of opposite surfaces in a peripheral portion of the X-ray transmitting film. The gasket material has a Brinell hardness smaller than that of the X-ray transmitting film. The formed X-ray transmitting window is able to be sandwiched and fastened between a pair of flanges in a gas-tight manner.

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