X-ray transmissive debris shield

Details X-ray transmissive debris shield X-ray transmissive debris shield

1994-10-13

1996-05-21

Wong, Don

X-ray or gamma ray systems or devices

Beam control

Window

378203, 378204, G21K 110

Patent

active

055197523

ABSTRACT:
An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.

REFERENCES:
patent: 2873379 (1959-02-01), Berends
patent: 4362965 (1982-12-01), Kendall
patent: 5090046 (1992-02-01), Friel
patent: 5185776 (1993-02-01), Townsend
patent: 5329569 (1994-07-01), Spielman
patent: 5335259 (1994-08-01), Hayashida et al.
Webster's Encyclopedia Unabridged Dictionary of the English Language.

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