X-ray or gamma ray systems or devices – Accessory – Alignment
Reexamination Certificate
2007-08-21
2007-08-21
Ho, Allen C. (Department: 2882)
X-ray or gamma ray systems or devices
Accessory
Alignment
C378S046000, C378S071000, C378S072000, C378S073000, C378S076000, C378S079000, C378S081000, C378S196000, C378S197000, C378S208000
Reexamination Certificate
active
11259191
ABSTRACT:
An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on the first swing arm and containing an X-ray tube and an X-ray optical element in a shield tube, an X-ray detector mounted on a second swing arm, and an optical camera for subjecting the inspection target disposed on the sample table to pattern recognition.
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Kiku Atsunori
Kinefuchi Takao
Motono Hiroshi
Nakano Asao
Ho Allen C.
Jordan and Hamburg LLP
Rigaku Corporation
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