Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2011-01-25
2011-01-25
Wells, Nikita (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML, C250S398000, C378S138000, C378S119000, C378S113000, C378S101000, C378S084000
Reexamination Certificate
active
07875857
ABSTRACT:
An X-ray photoelectron spectroscopy analysis system for analysing an insulating sample20, and a method of XPS analysis. The system comprises an X-ray generating means30having an exit opening32and being arranged to generate primary X-rays46,56which pass out of the exit opening in a sample direction towards a sample surface22for irradiation thereof. It has been found that the X-ray generating means in use additionally generates unwanted electrons258which may pass out of the exit opening substantially in the sample direction and cause undesirable sample charging effects. The system further comprises an electron deflection field generating means380,480,580arranged to generate a deflection field upstream of the sample surface. The deflection field is configured to deflect the unwanted electrons away from the sample direction, such that the unwanted electrons are prevented from reaching the sample surface.
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Haynes and Boone LLP
Thermo Fisher Scientific Inc.
Wells Nikita
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