X-ray mirror and production thereof

Details X-ray mirror and production thereof X-ray mirror and production thereof

1989-01-24

1990-05-08

Church, Craig E.

X-ray or gamma ray systems or devices

Beam control

378 84, 378 70, G21K 100

Patent

active

049244906

ABSTRACT:
An X-ray mirror having its layer structure in the sequence of: a substrate having the surface roughness (R.sub.max) of 1,000 .ANG. or below; an intermediate layer of high molecular weight material formed on this substrate and having a surface roughness (R.sub.max) of 100 .ANG. or below; and a thin film formed on this intermediate layer, the X-ray mirror being produced by the process steps of: providing a substrate having a surface roughness (R.sub.max) of 1,000 .ANG. or below; forming on this substrate an intermediate layer of a high molecular weight material by spin-coating with a surface roughness (R.sub.max) of 100 .ANG. or below; and finally forming a thin film on this intermediate layer.

REFERENCES:
patent: 4693933 (1987-09-01), Keem et al.

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