X-ray mask structure, and X-ray exposure process

Details X-ray mask structure, and X-ray exposure process X-ray mask structure, and X-ray exposure process

1995-11-30

1998-06-30

Angebranndt, Martin

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

378 34, 378 35, G03F 900

Patent

active

057731772

ABSTRACT:
The present invention provides an X-ray mask structure having an X-ray transmissive membrane, an X-ray absorber held on an X-ray transmissive membrane, and a holding frame that holds the X-ray transmissive membrane, and the X-ray transmissive membrane has a layer of aluminum nitride, and the X-ray absorber has a heavy metal nitride.

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T. Kanayma et al., "Reduction in x-ray mass distortion using amorphous WN absorber stress compensated with ion bombardment," Journal of Vacuum Science and Technology, Part B, vol. 6, pp. 174-177, Feb. 1988 New York.

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