X-ray or gamma ray systems or devices – Specific application – Absorption
Patent
1993-05-24
1995-02-07
Porta, David P.
X-ray or gamma ray systems or devices
Specific application
Absorption
378 21, 378 22, G01N 2304
Patent
active
053881362
ABSTRACT:
An X-ray computerized system for programmable, high-resolution X-ray inspection of manufactured electronic circuits. Such a system comprises: means for directing X-rays to produce X-ray images representing illuminations of circuit elements from different angles; and detecting means for detecting said images, said detecting means comprising a plurality of detectors, each of said detectors positioned to intercept X-rays after passing through a circuit element from a particular associated angle of illumination.
REFERENCES:
patent: 2207867 (1940-07-01), Loebell
patent: 3746872 (1973-07-01), Ashe et al.
patent: 3818220 (1974-06-01), Richards
patent: 4139776 (1979-02-01), Hellstrom
patent: 4926452 (1990-05-01), Baker et al.
Halliday David K.
McCall Colin D.
McKinnon Alexander S.
Smith Christopher D.
International Business Machines - Corporation
Peterson Jr. Charles W.
Porta David P.
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