X-ray generator and exposure apparatus

Details X-ray generator and exposure apparatus X-ray generator and exposure apparatus

2005-10-07

2008-03-25

Yun, Jurie (Department: 2882)

X-ray or gamma ray systems or devices

Source

C378S034000, C250S50400H

Reexamination Certificate

active

07349524

ABSTRACT:
An X-ray generator for generating plasma and X-ray emitted from the plasma includes a unit for generating the plasma, and plural reflection optical systems for introducing the X-ray through different optical paths.

REFERENCES:
patent: 6198793 (2001-03-01), Schultz et al.
patent: 6359969 (2002-03-01), Shmaenok
patent: 2004/0257546 (2004-12-01), Banine
patent: 2002-174700 (2002-06-01), None
patent: 2004-226244 (2004-08-01), None

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