X-ray generator and electrostatic remover using the same

X-ray or gamma ray systems or devices – Source – Electron tube

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Details

378141, 378143, H01J 3500

Patent

active

059498498

ABSTRACT:
To provide an X-ray generator capable of both being compact and containing an air-cooling mechanism, an X-ray generator according to the present invention houses within a protective case both an X-ray tube containing a cathode for irradiating a target with an electron beam, in which X-ray tube the target having a ground potential is fixed to the inner surface of an output window, which in turn is fixed to an electrically and thermally conductive output window support provided on the end of a bulb; and a power supply for driving the X-ray tube. A flange portion formed on the output window support so as to protrude externally contacts and is fixed to the thermally conductive protective case. As a result, heat near 100.degree. C. generated continuously in the X-ray tube is transferred to the protective case and dissipated externally. The thus configured X-ray generator is best suited when used as an electrostatic remover for removing electrostatic accumulations on an object, such as an integrated circuit.

REFERENCES:
patent: 4034251 (1977-07-01), Haas
patent: 4075526 (1978-02-01), Grubis
patent: 4384360 (1983-05-01), Kitadate et al.
patent: 4827371 (1989-05-01), Yost
patent: 5504799 (1996-04-01), Suzuki

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