X-ray generator

X-ray or gamma ray systems or devices – Source – Target

Reexamination Certificate

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Details

C378S124000, C378S126000

Reexamination Certificate

active

06377660

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention is related to an X-ray generator and X-ray generation. For example, the X-ray generator may be used for nondestructive testing for inspecting am aluminum castings (an integrated circuit), and so on for X-ray analysis, with an industrial X-ray apparatus for obtaining an X-ray picture of a cell, and so on.
2. Description of the Related Art
An X-ray generator has a tube body
01
the inside of which is kept in a vacuum state, as shown in FIG.
9
. The body
01
has an electron source
02
and a target member
03
therein. The target member
03
has a base member
05
, made of Aluminum, for example, on which a metal target
04
of Tungsten, for example, is evaporated. The base member
05
is attached to the body
01
.
The body
01
has an electrode
06
for pulling an electron beam out of the electron source
02
and an electron lens
07
. The electrode pulls out electrons as an electron beam from the electron source
02
and the lens
07
converges the beam. The converged electron beam is irradiated onto the metal target
04
and then the metal target
04
generates X-rays.
When it is necessary to make the focal point smaller to inspect an microscopic object, a small X-ray focal point on the large metal target
04
is created by converging an electron beam at a much smaller point with the electron lens
07
. In the above structure, it is impossible to make an X-ray focal point smaller than a certain size because electrons with negative charge in the X-ray beam repel one another. It is also necessary to cool the electron lens
07
which generates heat in use. Therefore, the X-ray generator becomes large because of the need for a cooling system for the electron lens
07
.
SUMMARY OF THE INVENTION
It is therefore an object of this invention to provide a low-cost and small X-ray generator which has a small X-ray focal point.


REFERENCES:
patent: 3753020 (1973-08-01), Zingaro
patent: 5010562 (1991-04-01), Hernandez et al.
patent: 5148462 (1992-09-01), Spitsyn et al.
patent: 5857008 (1999-01-01), Reinhold

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