X-ray generating apparatus

Details X-ray generating apparatus X-ray generating apparatus

1984-09-24

1986-12-23

Church, Craig E.

X-ray or gamma ray systems or devices

Source

Electron tube

328233, 328235, 378119, H05H 1304

Patent

active

046317430

ABSTRACT:
An X-ray generating apparatus provided with at least one deflecting means disposed between a freely selected pair of adjacent deflecting electromagnets and adapted to undulate electrons around a design orbit. When the deflecting means if formed of variable horizontally or vertically deflecting electromagnets capable of forming a variable magnetic field for electron on the orbit, the electrons are undulated around the design orbit and synchrotron radiation or powerful wiggler radiation from a wiggler is generated to irradiate a large area of a given substrate. Thus, in the transfer of patterns for the production of LSI devices for example, the X-ray generating apparatus enables highly intensive X-rays abundantly containing soft X-rays to be emitted uniformly to irradiate a wide area.

REFERENCES:
patent: 3344357 (1967-09-01), Blewett
patent: 3986026 (1976-10-01), Martin
patent: 4392080 (1983-07-01), Maschke
Physical Review Letters, vol. 36, No. 13, Mar. 29, 1976, pp. 717-720, Elias, Luis R. et al., "Observation of Stimulated Emission of Radiation by Relativistic Electrons in a Spatially Periodic Transverse Magnetic Field".

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