X-ray-fluorescence measurement of thin film thicknesses

Details X-ray-fluorescence measurement of thin film thicknesses X-ray-fluorescence measurement of thin film thicknesses

1978-03-31

1979-07-24

Krass, Errol A.

Boots, shoes, and leggings

250273, 250505, 364571, G06F 1520, G01N 2322

Patent

active

041625285

ABSTRACT:
The thicknesses of the thin film components of a sample that comprises plural thin films deposited on top of each other on a substrate are simultaneously measured by an x-ray-fluorescence system. Incident x-rays excite x-ray fluorescence in the sample. Detection of the excited fluorescence is enhanced by a unique collimator assembly that is also adapted to enable direct monitoring of the intensity of the incident x-rays.

REFERENCES:
patent: 2711480 (1955-06-01), Friedman
patent: 3107276 (1963-10-01), Cohen
patent: 3409774 (1968-11-01), Dykeman
patent: 3984679 (1976-10-01), Lublin et al.
patent: 4079237 (1978-03-01), Schlesinger
patent: 4089054 (1978-05-01), Ott
Bertin; "Measurement of Thickness of Films and Platings"; Principles and Practice of X-ray Spectrometric Analysis; Plenum Press, N.Y. pp. 811-820; 1975.
Zimmerman; "Industrial Applications of X-ray Methods for Measuring Plating Thickness"; Advances in X-ray Analysis, vol. 4; Proc. of 9th Annual Conf. on Applications of X-ray Analysis held Aug. 10-12, 1960; Plenum Press, N.Y.; pp. 335-350; 1961.

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