X-ray fluorescence inspection apparatus

Details X-ray fluorescence inspection apparatus X-ray fluorescence inspection apparatus

1994-07-20

1996-06-18

Wong, Don

X-ray or gamma ray systems or devices

Specific application

Fluorescence

378 45, 378156, G01N 23223

Patent

active

055286470

ABSTRACT:
X-ray Fluorescence Inspection Apparatus comprises an X-ray tube (1) for generating X-rays having a range of energies which are directed towards a sample position. A first filter assembly (3) is mounted between the X-ray tube (1) and the sample position and is movable between at least two positions to enable the energy band of X-rays reaching the sample position to be controlled in two different ways. An X-ray monitor (8) monitors X-rays from the sample position; and a second filter assembly (6) mounted between the sample position and the monitor (8) is movable between at least two positions to enable the energy band of X-rays reaching the monitor to be controlled in two different ways.

REFERENCES:
patent: 3079499 (1963-02-01), Long
patent: 3920984 (1975-11-01), Kirkendall et al.
patent: 4189645 (1980-02-01), Chaney et al.
patent: 4393512 (1983-07-01), Wang
patent: 4933960 (1990-06-01), Fujisaki
EPC Search Report dated Dec. 8, 1994.

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