X-ray exposure apparatus

Details X-ray exposure apparatus X-ray exposure apparatus

1993-02-09

1994-08-02

Porta, David P.

X-ray or gamma ray systems or devices

Beam control

Window

378 34, 378145, 378159, G21K 100

Patent

active

053352599

ABSTRACT:
An X-ray apparatus includes an X-ray pickup window through which synchrotron radiation light is projected, the X-ray pickup window having an X-ray transmission film; and a correcting system for correcting an intensity distribution of the synchrotron radiation light; wherein the X-ray transmission film has at least one of a film thickness distribution and a transmissivity distribution changing substantially in a predetermined direction; and wherein the X-ray transmission film is so disposed that the predetermined direction is substantially aligned with the direction of change of the intensity distribution of the synchrotron radiation light.

REFERENCES:
patent: 5123036 (1992-06-01), Uno et al.
patent: 5125014 (1992-06-01), Watanabe et al.
patent: 5134640 (1992-07-01), Hirokawa et al.
patent: 5172402 (1992-12-01), Mizusawa et al.
patent: 5204886 (1993-04-01), Dugdale

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