X-ray detector efficiency standard for electron microscopes

Details X-ray detector efficiency standard for electron microscopes X-ray detector efficiency standard for electron microscopes

1986-08-01

1988-05-24

Lesmes, George F.

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047465719

ABSTRACT:
An X-ray detector efficiency standard is formed of multiple spherical particles of various materials distributed over the surface of a substrate. The particles are preferably formed of pure materials, such as pure elements and stoichiometric compounds, having characteristic X-ray emission energies which span a range sufficient to determine the efficiency of the X-ray detector substantially over its operating range. The spherical particles may be formed by an electrohydrodynamic spraying process and have a diameter preferably in the range of 10 nanometers to 1 micron.

REFERENCES:
N. J. Zaluzec, "Quantitative X-ray Microanalysis: Instrumental Considerations and Applications to Materials Science", Chapter 4 in Introduction to Analytical Electron Microscopy, Plenum Press, New York, 1979, 121-167.
W. E. King, "An Emperical Technique to Measure X-Ray Production and Detection Efficiencies in the Analytical Electron Microscopy"; Symposium on High-Resolution Electron Microscopy, Tempe, Ariz., Jan. 7-11, 1985.

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