X-ray detector

Radiant energy – Invisible radiant energy responsive electric signalling – Semiconductor system

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Details

2503361, 25037006, 378156, 378157, G01T 100

Patent

active

051031000

ABSTRACT:
An X-ray detector, which is concerned with X-rays having wavelengths of less than 100 .ANG., includes an X-ray filter with a thickness smaller than a previously defined value, a semiconductor light-receiving element arranged behind the X-ray filter, and a measuring device for measuring an output produced by the semiconductor light-receiving element. This detector is provided with a grazing incidence mirror in front of the X-ray filter so that the wavelength selection and intensity measurement can be effected simultaneously. The X-ray detector has important advantages in practical use that the power source system does not come to a large scale, its periphery circuit is simple, and sensitivity is as high as one to two orders than that of a conventional X-ray diode.

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R. H. Day, et al., "Photoelectric quantum efficiencies and filter window absorption coefficients from 20 eV to 10 KeV", J. Appl. Phys. 52(11), Nov. 1981, pp. 6965-6973.

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