X-ray confocal defect detection systems and methods

Details X-ray confocal defect detection systems and methods X-ray confocal defect detection systems and methods

2007-05-01

2007-05-01

Thomas, Courtney (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Absorption

Reexamination Certificate

active

11346054

ABSTRACT:
An x-ray confocal defect detection system comprises an x-ray source, a confocal component, and defect detectors and operates on a target portion of a semiconductor device. The x-ray source generates x-ray energy. The semiconductor device includes a plurality of formed layers. The target portion is a selected layer or portion of the plurality of formed layers. At least a portion of the x-ray is transmitted through the semiconductor device as transmitted x-ray. The confocal component receives the transmitted x-ray and passes target x-ray intensity from the target portion of the transmitted x-ray energy. Detectors receive the target x-ray from the confocal component from which defect analysis can be performed.

REFERENCES:
patent: 4736397 (1988-04-01), Velasquez
patent: 6488037 (2002-12-01), Guldi
patent: 6834117 (2004-12-01), Rao et al.

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