X-ray beam position monitor and its position measurement method

Details X-ray beam position monitor and its position measurement method X-ray beam position monitor and its position measurement method

1996-04-05

1998-02-10

Porta, David P.

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

2503361, G01T 129

Patent

active

057172145

ABSTRACT:
The present invention provides a X-ray beam position monitor, including a diamond plate placed so that the X-ray beam pass through diamond plate, and a plurality of electrode pairs placed on both sides of the diamond plate. The monitor makes it possible to monitor position of high power X-ray beam with high accuracy and at high speed. In addition, the monitor can be stably operated and reduce costs for manufacturing itself.

REFERENCES:
patent: 3612858 (1971-10-01), Parry
patent: 5079425 (1992-01-01), Imai et al.
patent: 5387795 (1995-02-01), Kuzay et al.
patent: 5404014 (1995-04-01), Shu et al.

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