X-ray analyzing apparatus and x-ray irradiation angle setting me

Details X-ray analyzing apparatus and x-ray irradiation angle setting me X-ray analyzing apparatus and x-ray irradiation angle setting me

1997-10-23

1999-09-07

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

378 86, G01N 23223

Patent

active

059498471

ABSTRACT:
An X-ray analyzing apparatus includes an X-ray tube, a monochromator crystal for making an X-ray monochromic, a slit, a moving table for supporting a product to be tested such as a semiconductor wafer, a detector for detecting the intensity of the X-ray beam, a table controller for setting a three-dimensional position and an angle of the moving table, and another detector for detecting scattered X-rays or fluorescent X-rays from the test product. A slit is provided so as to be vertically movable between the test product and the detector and to define a pass position of the X-ray beam which enters the detector. Thus, an X-ray irradiation angle to the test product can be set quickly and at high precision.

REFERENCES:
patent: 5220591 (1993-06-01), Ohsugi et al.
patent: 5457726 (1995-10-01), Miyazaki

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