X-ray analyzer and X-ray analysis method

Details X-ray analyzer and X-ray analysis method X-ray analyzer and X-ray analysis method

2011-06-28

2011-06-28

Ho, Allen C. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Fluorescence

C378S044000, C378S045000, C378S088000

Reexamination Certificate

active

07970101

ABSTRACT:
An X-ray tube which irradiates a primary X-ray to an irradiation point on a sample, an X-ray detector which detects a characteristic X-ray and a scattered X-ray emitted from the sample and outputs a signal including energy information on the characteristic X-ray and scattered X-ray, an analyzer which analyzes the signal, a sample stage on which the sample is placed, a moving mechanism which moves the sample on the sample stage, the X-ray tube, and the X-ray detector relative to each other, a height measuring mechanism which measures a maximum height of the sample, and a control unit which adjusts the distance between the sample and the X-ray tube and the distance between the sample and the X-ray detector by controlling the moving mechanism on the basis of the measured maximum height of the sample, are included.

REFERENCES:
patent: 6038280 (2000-03-01), Rossiger et al.
patent: 6324251 (2001-11-01), Kuwabara
patent: 6345086 (2002-02-01), Ferrandino et al.
patent: 6647090 (2003-11-01), Kawahara et al.
patent: 6885726 (2005-04-01), Uehara et al.
patent: 7313220 (2007-12-01), Katz
patent: 2001/0021240 (2001-09-01), Kojima et al.
patent: 04-175648 (1992-06-01), None

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