X-ray analyzer and X-ray analysis method

Details X-ray analyzer and X-ray analysis method X-ray analyzer and X-ray analysis method

2011-08-16

2011-08-16

Ho, Allen C. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Fluorescence

C378S044000, C378S045000, C378S088000, C378S090000

Reexamination Certificate

active

08000439

ABSTRACT:
An X-ray tube which irradiates a primary X-ray to an irradiation point on a sample, an X-ray detector which detects a characteristic X-ray and a scattered X-ray emitted from the sample and outputs a signal including energy information of the characteristic X-ray and scattered X-ray, an analyzer which analyzes the signal, a first observation system which optically observes a surface of the sample in order to determine the irradiation point, and a second observation system which has a smaller depth of field than the first observation system, optically observes a narrow region, and measures the distance from the determined irradiation point by focus adjustment are included.

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