Workstation for processing a flexible membrane

Details Workstation for processing a flexible membrane Workstation for processing a flexible membrane

1995-10-02

1997-09-16

Ramsey, Kenneth J.

Metal fusion bonding

With means to handle work or product

Work portion comprises electrical component

269 21, H01L 2168

Patent

active

056671288

ABSTRACT:
The present invention provides a workstation for processing a flexible membrane (16). A frame (14) defines an opening (24) adapted to receive and support the flexible membrane (16). A platform (12) supports and heats the flexible membrane (16) during processing. The platform (12) includes a membrane-support surface (20) and a frame-support surface (18) about the membrane-support surface (20) for engaging the lower surface (38) during processing. The frame-support surface (18) is axially spaced apart from the membrane-support surface (20) such that engagement with the membrane-support surface (20) causes disengagement of the flexible membrane (16) from frame (14). The platform (12) further includes vacuum means (22) for urging the flexible membrane (16) against the membrane-support surface (20) and heating means for heating the platform (12). This heats the flexible membrane (16) resting on the membrane-support surface (20) and also heats the frame (14) resting on the frame-support surface (18).

REFERENCES:
patent: 2989827 (1961-06-01), Groth
patent: 4573627 (1986-03-01), Miller et al.
patent: 5341979 (1994-08-01), Gupta
patent: 5370301 (1994-12-01), Belcher et al.

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