Supports – Resilient support – Including additional energy absorbing means – e.g. – fluid or...
Patent
1998-08-04
2000-09-05
Ramirez, Ramon O.
Supports
Resilient support
Including additional energy absorbing means, e.g., fluid or...
F16M 1300
Patent
active
061130567
ABSTRACT:
The present invention provides an apparatus for supporting a workpiece in a precision processing system. The apparatus includes a plurality of workpiece contact elements for supporting the workpiece substantially in a plane, and a compliant stiction support for reducing workpiece vibration. The workpiece supporting apparatus can include a base member connected to the workpiece contact elements and to the compliant stiction support. The complaint stiction support can include a slider assembly for contacting the workpiece. The slider assembly is in sliding, frictional connection with the base member. The compliant stiction support can further include a workpiece contact spring element for forcing the slider assembly into contact with the workpiece. The compliant stiction support can further include a stiction spring element. The stiction spring element is in contact with the slider element. The stiction spring element forces the slider element into frictional contact with the base member. Thus, the compliant stiction support stiffly supports the workpiece against vibrational forces.
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King Anita M.
Liepmann W. Hugo
Micrion Corporation
Ramirez Ramon O.
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