Workpiece transfer device

Details Workpiece transfer device Workpiece transfer device

2005-09-02

2008-03-18

Underwood, Donald (Department: 3652)

Material or article handling

Vertically swinging load support

Grab

C294S087100, C294S099100, C294S118000

Reexamination Certificate

active

07344352

ABSTRACT:
A workpiece transfer assembly for manipulating one or more workpieces, such as semiconductor wafers includes a plurality of coacting arms that include one or more arcuate portions corresponding to an outer diameter of a workpiece. The arcuate portion has a workpiece engaging surface adapted to engage an outer edge of the workpiece. At least one of the coacting arms includes a flexure assembly that allows deformation of the workpiece engaging surface in a direction away from the workpiece in response to pressure on the outer edge of the workpiece from the workpiece engaging surface.

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International Search Report for PCT International No. PCT/US06/034323 dated Mar. 08, 2007.

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