Workpiece supporting mechanism

Details Workpiece supporting mechanism Workpiece supporting mechanism

1989-05-11

1992-10-13

Hix, L. T.

Photocopying

Projection printing and copying cameras

Step and repeat

355 77, G03B 2742, G03B 2732

Patent

active

051555239

ABSTRACT:
A workpiece supporting mechanism suitably usable in an exposure apparatus, is disclosed. The mechanism includes a workpiece supporting member which is provided with a displacement sensor such as a speed sensor or an acceleration sensor. A vibrator such as a piezoelectric device is added to the supporting member or a stage which supports the supporting member. Any vibration of the workpiece or the supporting member is detected by the displacement sensor and, in accordance with the detection, the vibrator is energized to cancel the vibration of the workpiece and the workpiece supporting member.

REFERENCES:
patent: 3569718 (1971-03-01), Borner
patent: 4553834 (1985-11-01), Ayata et al.
patent: 4595282 (1986-06-01), Takahashi
patent: 4711567 (1987-12-01), Tanimoto
patent: 4723086 (1988-02-01), Leibovich et al.
patent: 4875076 (1989-10-01), Torigoe et al.
patent: 5063582 (1991-11-01), Mori et al.

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