Workpiece support apparatus for use with cathode sputtering devi

Details Workpiece support apparatus for use with cathode sputtering devi Workpiece support apparatus for use with cathode sputtering devi

1979-12-03

1981-06-02

Gantz, Delbert E.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

118728, 269287, C23C 1500

Patent

active

042710057

ABSTRACT:
Apparatus for mounting a workpiece to be coated in a cathode sputtering device is disclosed. Various construction details enable effective masking or shielding of a portion of the workpiece from coating deposition. In detailed form a box-like member circumscribes the platform of a blade or vane to be coated and encases the attachment section of the blade or vane.

REFERENCES:
patent: 4090941 (1978-05-01), Wright et al.

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