Workpiece holding device and polishing apparatus therewith

Details Workpiece holding device and polishing apparatus therewith Workpiece holding device and polishing apparatus therewith

1998-02-04

2000-02-15

Eley, Timothy V.

Abrading

Machine

Rotary tool

451398, 451388, B24B 2900

Patent

active

060246332

ABSTRACT:
A workpiece holding device enables stable polishing to be performed without sacrificing the structural strength of a top ring or the space necessary for machining a through hole or implanting engaging pins while allowing close contact to be made between a workpiece to a polishing cloth on a polishing tool. The top ring includes a top ring member having a holder plate for holding the workpiece on a front surface and a cover plate attached to a back surface of the holder plate by engaging a depression section formed on a back surface of the holder plate with a protrusion section formed on a front surface of the cover plate. A curved surface bearing unit provided between an end portion of a drive shaft and a back surface of the cover plate couples the drive shaft and the top ring member while permitting motion of the top ring member relative to the polishing tool. At least a portion of the curved surface bearing unit is positioned within the depression section.

REFERENCES:
patent: 4194324 (1980-03-01), Bonora et al.
patent: 4270314 (1981-06-01), Cesna
patent: 4373991 (1983-02-01), Banks
patent: 5423558 (1995-06-01), Koeth et al.
patent: 5441444 (1995-08-01), Nakajima
patent: 5476414 (1995-12-01), Hirose et al.
patent: 5651724 (1997-07-01), Kimura et al.
patent: 5670011 (1997-09-01), Togawa et al.
patent: 5839947 (1998-11-01), Kimura et al.

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