Workpiece holding and positioning mechanism and system

Details Workpiece holding and positioning mechanism and system Workpiece holding and positioning mechanism and system

1983-11-21

1985-11-26

Paperner, Leslie J.

Material or article handling

Vertically swinging load support

With rectilinear translation

294116, 414 8, 414735, B66C 2318

Patent

active

045552169

ABSTRACT:
A workpiece positioning mechanism (10, FIG. 1) includes a movable arm (12) having a plurality of joints (14). A pair of grippers (26 and 28) are movable toward and away from a semiconductor wafer boat (44). The grippers are held in position by a stop member (70, FIG. 4) when they engage the boat (44) and locked in an open position by prongs (86). A solenoid (30) is actuated to allow the grippers to move between their open and closed positions. Flexible bellows (22 and 94) and tubing (24) surround moving parts (e.g., 14, 62, 64, 66, 80) of the mechanism (10) to prevent contamination of the semiconductor wafers (52).

REFERENCES:
patent: 3408101 (1968-10-01), Savary
patent: 3606162 (1971-09-01), Lehmann
patent: 3665148 (1972-05-01), Yasenchak et al.
patent: 3915314 (1975-10-01), Anikanov et al.
patent: 4049935 (1977-09-01), Gruber
patent: 4093296 (1978-06-01), Itoh

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