Workpiece holder for polishing operation

Abrasive tool making process – material – or composition – Impregnating or coating an abrasive tool

Patent

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Details

511315, 51129, 51216LP, B24B 404

Patent

active

045121133

ABSTRACT:
The workholder includes a carrier to which a flat perforated template is removably secured. An insert is removably mounted in each hole and removably supports a silicon wafer to facilitate polishing the wafer.

REFERENCES:
patent: 3449870 (1969-06-01), Jensen
patent: 3453783 (1969-07-01), Queen
patent: 3924361 (1975-12-01), White et al.
patent: 4081928 (1978-04-01), Kinnebren et al.
patent: 4132037 (1979-01-01), Bonora
patent: 4221083 (1980-09-01), Carroll

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