Workpiece holder for clean container

Details Workpiece holder for clean container Workpiece holder for clean container

2006-04-25

2006-04-25

Gehman, Bryon P. (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S454000, C211S041180

Reexamination Certificate

active

07032758

ABSTRACT:
A workpiece holder is provided inside a clean container such that when covering a housing of the clean container on a base of the clean container, the vertical slide of the workpiece holder is stopped at the base, and a locating member is continuously lowered with the housing, thereby causing the vertical slide to slide upwardly along the locating member and to turn a link, and then causing a holder member to be driven by the link to force a thrust face against workpieces, and therefore the workpieces are pushed into position in a cassette on the base. Because the vertical slide does not displace relative to the base when covering the housing on the base, neither friction nor particles are produced, and workpieces are well protected against contamination.

REFERENCES:
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4815912 (1989-03-01), Maney et al.
patent: 5452795 (1995-09-01), Gallagher et al.
patent: 5890597 (1999-04-01), Fan et al.
patent: 5960959 (1999-10-01), Wu et al.

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