Coating apparatus – Work holders – or handling devices
Patent
1980-08-21
1983-09-13
Smith, John D.
Coating apparatus
Work holders, or handling devices
118 50, 118724, 118732, 118730, 165 80E, 16510417, 269 21, B05C 1302
Patent
active
044035675
ABSTRACT:
A workpiece holder for semiconductor workpieces during treatment with a substantially cylindrical casing shaped like a hockey puck having an upper surface for receiving a workpiece, a lower surface, at least one bore between the surfaces for applying a vacuum and a hollow interior for a heat absorbing composition preferably one which melts above ambient temperature but below temperatures which might damage workpieces. Suitable compositions include Glauber's salt, and calcium chloride hexahydrate. In one embodiment, curved, substantially radially extending vanes are preferably provided in the interior space for causing radial flow when the casing is rotated or oscillated. In a second embodiment, a plurality of bores extend between a manifold which extends radially and a plurality of circumferential grooves.
REFERENCES:
patent: 3369989 (1968-02-01), Kay et al.
patent: 3780356 (1973-12-01), Laing
patent: 4091257 (1978-05-01), Anthony et al.
patent: 4139051 (1979-02-01), Jones et al.
patent: 4187801 (1980-02-01), Monk
patent: 4244148 (1981-01-01), Chabaron et al.
patent: 4274476 (1981-06-01), Garrett
patent: 4292189 (1981-09-01), Chen
daCosta Harry
Howerton Hugh K.
Hughes William E.
Monk Gaines W.
Commonwealth Scientific Corporation
Plantz Bernard F.
Smith John D.
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