Workpiece handling end-effector and a method for processing...

Details Workpiece handling end-effector and a method for processing... Workpiece handling end-effector and a method for processing...

2005-12-27

2005-12-27

Lillis, Eileen D. (Department: 3652)

Handling: hand and hoist-line implements

Grapple

Pivoted jaws

C294S090000, C414S739000, C414S941000, C901S039000

Reexamination Certificate

active

06979034

ABSTRACT:
A two sided wafer handling end-effector provides for the efficient loading and unloading of wafers into and out of a wafer processing apparatus. Each side of the end-effector includes spaced apart rotatable catch mechanisms between which a wafer is firmly grasped. When the end-effector is positioned beneath the wafer processing apparatus the catch mechanisms are rotated to an open position and a lifting surface on the catch mechanisms lifts the wafer into the wafer processing apparatus. When the catch mechanisms are in the open position the wafer is centered on the end-effector by rotatable rocker assemblies that contact the edge of the wafer. As the end-effector is raised into contact with the processing apparatus, the rocker assemblies rotate to a lowered position in the end-effector while arcuate surfaces on the assemblies maintain contact with the wafer edge.

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patent: 6761362 (2004-07-01), Noguchi
patent: 02-288247 (1990-11-01), None

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