Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1984-05-17
1986-07-15
Williams, Howard S.
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
118642, 34 39, 34 68, 34 4, 34243C, 34236, C25D 1300, F26B 328
Patent
active
046004912
ABSTRACT:
A container comprising a bottom and walls extending therefrom forming a volume having an opening opposite from said bottom; and means for enclosing the volume, the enclosing means including means for supporting and suspending a workpiece within the enclosed volume apart from the walls and the bottom and means for circulating the heated air within said enclosed volume including an axial or radial flow fan.
REFERENCES:
patent: 3575832 (1971-04-01), Johnson
patent: 4136463 (1979-01-01), Nolan et al.
patent: 4268973 (1981-05-01), Jezuit et al.
patent: 4314410 (1982-02-01), Nichols
patent: 4319408 (1982-03-01), Kuboyama
patent: 4416068 (1983-11-01), Nilsson et al.
patent: 4480394 (1984-11-01), Salas
patent: 4546553 (1985-10-01), Best
Urquhart Gordon T.
Urquhart Thomas N.
Boggs Jr. B. J.
Seitzman Markell
Williams Howard S.
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