Workpiece double-disc grinding apparatus and workpiece...

Details Workpiece double-disc grinding apparatus and workpiece... Workpiece double-disc grinding apparatus and workpiece...

2009-01-23

2011-10-04

Eley, Timothy V (Department: 3723)

Abrading

Machine

Rotary tool

C451S268000, C451S259000

Reexamination Certificate

active

08029339

ABSTRACT:
A workpiece double-disc grinding apparatus including a holder that supports a thin-plate-like workpiece from an outer periphery along a radial direction and is rotatable; a pair of static pressure support members that support the holder from both sides along an axial direction of the rotation thereof in a contactless manner based on a static fluid pressure; and a pair of grinding stones that simultaneously grind both surfaces of a workpiece supported by the holder, in which an interval between the holder and the static pressure support member is not greater than 50 μm, and the static pressure of the fluid that is not lower than 0.3 MPa. As a result, the workpiece double-disc grinding apparatus and a workpiece double-disc grinding method can stabilize a position of the holder, which can be a cause that degrades a nanotopography of the workpiece in the double-disc grinding for the workpiece.

REFERENCES:
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patent: WO 00/67950 (2000-11-01), None
patent: WO 2006/018961 (2006-02-01), None
Search Report dated Mar. 10, 2009 issued in International Patent Application No. PCT/JP2009/000247 (with translation).

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